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Enquiries: please contact 01372 378822 or use our enquiry form

KLA Tencor the world's leading supplier of process control and yield management solutions for the semiconductor and related industries, has acquired Ambios Technology, a leading manufacturer of high-resolution surface metrology systems.

The new, integrated product suite will enable customers to select the best combination of performance and price required for their research or production needs.



Ambios XP-Plus Series Stylus Profilers





Built on the success of the original XP profilers, the new XP-Plus Series Stylus Profilers are the result of five years of customer feedback and product innovation. The new XP-Plus systems provide the widest range of application specific capability. With a maximum 1.2 millimeter Z range, sub-angstrom height equivalent noise, 5 angstrom step height repeatability, optional 50nm encoded X-Y stages, 200mm long scan capability and many other features, the XP-Plus Series sets the new standard of excellence in the industry.

Ambios XP-Plus Series industry leading standard features include:
1.2mm Z range is the largest standard Z range in the industry
Industry best 5 angstrom step height repeatability
Lowest height equivalent noise: < 1 angstrom
Low force stylus: 0.03mg–10mg
Smallest resolvable step of 5 angstroms
More selectable Z ranges for improved application flexibility
200mm long scan capability (XP-300 only)
Thin film stress measurements
Scan stitching
Step detection – two methods


Product Range:




XP-100

The XP-100 is designed for the researcher who is interested in getting fast repeatable data from an instrument that is not encumbered by unneeded levels of complication. Simply position your sample on the scan stage, select a scan recipe, click the scan button, and as soon as the scan is complete, your surface data is immediately available for analysis. With a low force stylus, long range Z sensor, and new software, the XP-100 is a great choice for the lab.


XP-200

The XP-200 offers all of the capabilities of the XP-100 and more. With its motorized 150 X 178mm X-Y stages, the XP-200 can be programmed to automatically make measurements at up to 999 different locations on your sample. The X-Y stages use highly precise encoders to assure proper positioning of your sample. As an added feature, the XP-200 incorporates a 4X motorized zoom camera for highly versatile sample visualization. For either the researcher or process engineer the XP-200 delivers great performance at an affordable price.

PDF Download
XP-Plus Series Brochure (PDF, 2,2 MB)


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Heath Young
Phone: 01372 378822
Fax: 01372 375353
heath@lotoriel.co.uk

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www.ambiostech.com

 

 

LOT-Oriel UK
E-mail: info@lotoriel.co.uk

1 Mole Business Park
Leatherhead, Surrey, KT22 7BA

Phone: 01372 378822
Fax: 01372 375353


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