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| Enquiries: please contact 01372 378822 or use our enquiry form
KLA Tencor the world's leading supplier of process control and yield management solutions for the semiconductor and related industries, has acquired Ambios Technology, a leading manufacturer of high-resolution surface metrology systems.
The new, integrated product suite will enable customers to select the best combination of performance and price required for their research or production needs. | |
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Ambios XP-Plus Series Stylus Profilers |
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Built on the success of the original XP profilers, the new XP-Plus Series Stylus Profilers are the result of five years of customer feedback and product innovation. The new XP-Plus systems provide the widest range of application specific capability. With a maximum 1.2 millimeter Z range, sub-angstrom height equivalent noise, 5 angstrom step height repeatability, optional 50nm encoded X-Y stages, 200mm long scan capability and many other features, the XP-Plus Series sets the new standard of excellence in the industry.
Ambios XP-Plus Series industry leading standard features include:
 | 1.2mm Z range is the largest standard Z range in the industry
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| Industry best 5 angstrom step height repeatability
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| Lowest height equivalent noise: < 1 angstrom
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| Low force stylus: 0.03mg–10mg
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| Smallest resolvable step of 5 angstroms
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| More selectable Z ranges for improved application flexibility
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| 200mm long scan capability (XP-300 only)
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| Thin film stress measurements
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| Scan stitching
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| Step detection – two methods
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Product Range:
XP-100
The XP-100 is designed for the researcher who is interested in getting fast repeatable data from an instrument that is not encumbered by unneeded levels of complication. Simply position your sample on the scan stage, select a scan recipe, click the scan button, and as soon as the scan is complete, your surface data is immediately available for analysis. With a low force stylus, long range Z sensor, and new software, the XP-100 is a great choice for the lab.
XP-200
The XP-200 offers all of the capabilities of the XP-100 and more. With its motorized 150 X 178mm X-Y stages, the XP-200 can be programmed to automatically make measurements at up to 999 different locations on your sample. The X-Y stages use highly precise encoders to assure proper positioning of your sample. As an added feature, the XP-200 incorporates a 4X motorized zoom camera for highly versatile sample visualization. For either the researcher or process engineer the XP-200 delivers great performance at an affordable price. |
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