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VASE®
Research Spectroscopic Ellipsometer

The VASE® features totally automated thin film characterization, high-precision angle, and a wide spectral range (193nm to 2200nm). It is available with either vertical or horizontal sample mounting, automated sample mapping, and focused spot size. This is the perfect RESEARCH ellipsometer.


VASE® Key Benefits



Highest Precision and Accuracy of any Spectroscopy Ellipsometer
Wide Spectral Range: 193 to 2200 nm.
Totally Automated Angle of Incidence
Nondestructive Materials Analysis
Easily characterize all types of materials:
semiconductors, dielectrics, polymers, metals, multilayers, and more
Acquire:
- Reflected and transmitted ellipsometry
- Polarized transmission and reflection intensity
- % depolarization (requires AutoRetarder)
- Anisotropic measurements (ideal with AutoRetarder)
- Mueller Matrix
- Scatterometry




VASE® Ellipsometer Options

NIR Upgrade:
extend range (240 to 1100nm) further into NIR, to 1700nm
Extended NIR Upgrade:
extend range (240 to 1100nm) further into NIR, to 2200nm
DUV Upgrade:
extend range (240 to 1100nm) deeper into UV, to 193nm.
AutoRetarder™
Sample Heating Stage
Control the temperature of your sample from room temperature to 300º C.
Automated Sample Translation:
150mm by 150mm XY
Manual Sample Translation:
45mm by 45mm XY
Focusing:
Decreases the light beam to 200 microns in diameter. Focusing optics limit spectral range from 400 to 1100nm but are detachable for normal spot size measurements over full spectral range.
Cryostat
allows measurements at variable sample temperatures (4.2 to 700 Kelvin)

PDF Download
VASE Brochure (PDF, 1,7 MB)

Video
VASE Video (WMV, 2,3 MB)

Pages in this Chapter
Spectroscopic Ellipsometers
VASE
VUV-VASE
IR-VASE
M-2000
Alpha-SE
Photovoltaic Applications
Software
T-Solar Ellipsometer for Photovoltaic Applications

www.jawoollam.com


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Fax: 01372 375353


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