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M-2000™ –
Fast Spectroscopic Ellipsometer
The M-2000 Spectroscopic Ellipsometer has an advanced optical design, large spectral range, and fast data acquisition time. These features makes it ideal for in-situ process monitoring and control , quality control, uniformity mapping, and more. The entire spectrum of data are acquired in a fraction of a second.



M-2000® Key Benefits
Patented RCE Technology (Rotating Compensator Ellipsometer)
- RCE provides accurate measurement of any polarization state ( Y: 0° to 90°, D:0° to 360°).

Advanced Measurements:
The RCE Technology allows the M-2000® to make advanced measurements of:
- Depolarization
- Anisotropy
- Mueller-matrix elements

Fast Measurement Speed.
- CCD detection measures all wavelengths with our advanced detection system featuring improved Signal-to-Noise and simultaneous collection of ALL wavelengths.

Flexible System Integration
- Ex-situ mapping
- In-situ process and control

Wide Spectral Range.
- Up to 700 wavelengths are collected simultaneously. The M-2000® is available in a diverse range of configurations for measurements from the ultraviolet to the near infrared on a single system.



WVASE32 Acquisition an Analysis Software
WVASE32 is the most comprehensive program available for data acquisition and analysis. It combines state-of-the-art mathematical fitting algorithms with a large selection of modeling options for fast, accurate data analysis.


M-2000 Models



The J. A. Woollam M-2000 family of ellipsometers is flexible enough to meet almost any industry requirement. Below is a list of different M-2000 ellipsometer configurations that are currently available.




M-2000U



Model "U" (for ultraviolet) ellipsometer is ideal for a large variety of applications, including both in-situ and ex-situ measurements of dielectrics, polymers, semiconductors, metal, etc. A spectral range from 245nm to 1000nm covers critical pints in semiconductors, making it useful for measuring and controlling compound semiconductor alloy ratios. A broad range of film thick nesses (sub-nanometer to 10 microns) are accessible with its resolution of 470 simultaneously measured wavelengths.

M-2000V



Model "V" (for visible) ellipsometer uses a QTH lamp to reduce both the system and operating cost. The compact optics make it quite convenient to mount on a chamber for in-situ use. The spectral range (370nm to 1000nm, 390 wavelengths) is ideal for measurements of dielectrics, amorphous semiconductors, polymers, etc.

M-2000D



Model "D" ellipsometer measures 500 wavelengths covering 193 to 1000nm, this is ideal for semiconductor applications. Measure optical constants at each lithograph line (193nm, 248nm, 365nm...). Fast measurement speeds cover a large spectral range allow fast uniformity maps of refractive index and thickness.

Short wavelengths provide increased sensitivity to ultra-thin films and longer wavelengths ensure a transparent region for thickness measurements in most materials.


Near IR Upgrade
All M-2000 ellipsometer models (expect the M-2000F) can be upgraded to include 220 wavelengths from 1000nm to 1700nm. NIR wavelengths are ideal for measuring conductive oxides, material absorbing in the visible, thicker films, and material used for telecommunications.


M-2000F (Focused Beam)
The focused beam M-2000 ellipsometer provides a small measurement spot. This instrument is ideal for applications where the measurement area is very small. Examples include patterned wafers, hard-drive slider heads, non-flat samples like curved or spherical lenses, and more!

Key Benefits
Focusing Spot Size: 25µm x 60µm
Fixed angle base: 65° angle of incidence
Two spectral ranges available:
M-2000VF: 380 nm to 1000nm (390 wavelengths)
M-2000UF: 245 nm to 1000nm (470 wavelengths)
Available Options:
Automated Sample Translation:
100mm by 100mm XY
Manual Sample Translation:
25mm by 25mm XY
50mm by 50mm XY


M-2000® Ellipsometer Options
NIR Upgrade:
Extend spectral range of Models "V", "U", and "D" to 1700nm with an additional 110 wavelengths from 1000nm to 1700nm.

Sample Heating Stage
Control the temperature of your sample from room temperature to 300° C. Compatible with both vertical and horizontal ellipsometer bases.

Available Bases:
1. Fixed Angle (75°), horizontal sample mount
2. Manually Adjustable Angle (45° to 90°), horizontal sample mount
3. Automated Angle (45° to 90°), vertical or horizontal sample mount

In-Situ Package:
Includes chamber windows, tilt stages, and all mounting hardware necessary to attach M-2000® to 2 3/4 " vacuum flange.

Automated Sample Translation:
100mm by 100mm XY (horizontal sample stage only)
200mm Rq (horizontal sample stage only)
300mm Rq (horizontal sample stage only)

Manual Sample Translation:
25mm by 25mm XY ( horizontal sample stage only)
50mm by 50mm XY ( horizontal sample stage only)

Focusing:
Models V and VI: 150 microns beam diameter over all wavelengths.
Models U, D, UI, and DI: 300 microns beam diameter over all wavelengths focusing optics detach for measurements with standard spot size.
**Small spot beam diameter available (<50 microns) with the M-2000F

PDF Download
M-2000 Brochure (PDF, 1,9 MB)

Video
Micro Spot M2000 Video (WMV, 1,7 MB)
Automated M-2000UI Video (WMV, 1,7 MB)

Pages in this Chapter
Spectroscopic Ellipsometers
VASE
VUV-VASE
IR-VASE
M-2000
Alpha-SE
Photovoltaic Applications
Software
T-Solar Ellipsometer for Photovoltaic Applications

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