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Spectroscopic Ellipsometers

Spectroscopic ellipsometry is a fast, accurate technique that measures a range of optical parameters by changes in the polarisation state of reflected light from a sample. Ellipsometers have a wide range of applications for thin film characterisation and can be used ex-situ to measure multi-layer thickness and refractive index, or in-situ to monitor and control the deposition process down to sub-nanometre thickness level. JA Woollam are world leaders in spectroscopic ellipsometry and their instruments are in use throughout the world.

Applications
Optical coatings
Semiconductors
Display Devices
Photovoltaic
Flat Panel Display



Click here for details of the next Woollam ellipsometer workshop on November 16th 2010

VASE® (with Video)
Powerfull R&D variable angle spectroscopic ellipsometer with wide spectral range (193-2200nm)
M-2000® (with Video)
Revolutionary rotating compensator technology. Many spectral ranges available from 193 to 1700nm
VUV-VASE™ (with Video)
Spectroscopic ellipsometer covering the vacuum UV to the NIR. Perfect for lithography applications at 248nm, 193nm, and 157nm
Alpha-SE™ (with Video)
Low cost spectroscopic ellipsometer, easy to use
IR-VASE®
Infrared ellipsometer with spectral coverage from 2 to 35µm
Photovoltaic Applications Using Spectroscopic Ellipsometry
T-Solar Ellipsometer for Photovoltaic Applications Software

Application Notes
Spectroscopic Ellipsometry for ALD Technology (PDF, 300 KB)
Characterizing Processes with CompleteEASE: In Situ Applications (PDF, 737 KB)
IR-VASE® Analysis of IR-Optical Materials (PDF, 588 KB)
Prisim Liquid Measurements (PDF, 542 KB)
Slider Heads: Thin DLC on AlTiC (PDF, 169 KB)
SE for Telecom Applications: Semiconductor Devices (PDF, 608 KB)

Woollam Newsletter, Issue 11 (PDF, 712 KB)
Woollam Newsletter, Issue 9 (PDF, 855 KB)
Woollam Newsletter, Issue 8 (PDF, 1,6 MB)
Woollam Newsletter, Issue 7 (PDF, 3,7 MB)
Woollam Co. (www.jawoollam.com)


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Heath Young
Phone: 01372 378822
Fax: 01372 375353
heath@lotoriel.co.uk

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LOT-Oriel UK
E-mail: info@lotoriel.co.uk

1 Mole Business Park
Leatherhead, Surrey, KT22 7BA

Phone: 01372 378822
Fax: 01372 375353


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