LOT-Oriel - VUV-VASE

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VUV-VASE
Spectroscopic Ellipsometer for spectral range down to vacuum ultraviolet

The new VUV-VASE provides spectroscopic ellipsometry even down to the VUV spectral range:

spectral range: 146 to 1700 nm

verticale sample mount

motorized angle of incidence goniometer: 25° to 90°

AutoRetarder

Ellipsometry, Transmittance and reflectance

large sample load lock cell: 300mm wafer, 6" photo-masks

XY sample mapping

The VUV-VASE received the 'R&D Top 100' as well as the 'Semiconductor International Editors Choice Best Product' award 2000!

Video

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Your contact:

Henryk Dluzewski
Your contact in Poland
Phone: +48 322482048
Fax: +48 322482048
dluzewski@lot-oriel.com

Dr. Thomas Wagner
Phone: +49 6151 880668
Fax: +49 6151 896667
wagner@lot-oriel.de

Linki:

Nowości:


→	Large Area Imaging at -100 °C ....the Andor iKon-M (PDF, 246 KB)
→	Merger between LOT-Oriel Europe and Quantum Design (PDF, 56 KB)
→	Near Infrared Beam Profiler
→	New Ultra High Speed Camera Cheetah


	LOT-Oriel Polska E-mail: dluzewski@lot-oriel.com				Szyb Walenty 32 41-700 RUDA SLASKA, POLEN				Phone/Fax: 48 322482048		emotiv design