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Spectroscopic Ellipsometer VASE®
(Variable Angle of incidence Spectroscopic Ellipsometer)

1. Ex-situ Spectroscopic Ellipsometer:

vertical sample mount (V-VASE)

horizontal sample mount (H-VASE)

computer-controlled angle of incidence goniometer 20° - 90°

single or double chamber monochromator

spectral range 240 - 1100 nm (standard)

NIR to 1700 nm

extended NIR to 2200 nm

DUV from 193 nm

AutoRetarder (V-VASE)

computer-controlled 150 mm or 200 mm XY mapping

computer-controlled 350 mm x 400 mm mapping

(H-VASE)

manual 25 mm or 50 mm XY translation

200 µm focused beam option

camera

cryostat (4.2 to 470K)

heat cell (up to 300°C)

2. In-situ Spectroscopic Ellipsometer:

single or double chamber monochromator

spectral range 240 - 1100 nm (standard)

NIR to 1700 nm

In-situ mounts with UHV windows

Software

Application Notes

Video

VASE Video (WMV, 2,3 MB)

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Your contact:

Henryk Dluzewski
Your contact in Poland
Phone: +48 322445714
Fax: +48 322445714
dluzewski@lot-oriel.com

Dr. Thomas Wagner
Phone: +49 6151 880668
Fax: +49 6151 896667
wagner@lot-oriel.de

Linki:


Quantum Design:
→	www.qd-international.com


External Links:
→	www.jawoollam.com

Nowości:


→	Spectrum European Edition 11 (June 10) is online!
→	Anasys Instruments: Nanoscale IR spectroscopy and thermal analysis
→	SPM insert for the QD PPMS®


	LOT-Oriel Polska E-mail: kowalczyk@lot-oriel.pl				Szyb Walenty 32 41-700 RUDA SLASKA, POLEN				Phone/Fax: 48 322482048		emotiv design

Spectroscopic Ellipsometer VASE® (Variable Angle of incidence Spectroscopic Ellipsometer)

1. Ex-situ Spectroscopic Ellipsometer:

2. In-situ Spectroscopic Ellipsometer:

Spectroscopic Ellipsometer VASE®
(Variable Angle of incidence Spectroscopic Ellipsometer)