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Spectroscopic Ellipsometer VASE®
(Variable Angle of incidence Spectroscopic Ellipsometer)

1. Ex-situ Spectroscopic Ellipsometer:

vertical sample mount (V-VASE)
horizontal sample mount (H-VASE)
computer-controlled angle of incidence goniometer 20° - 90°
single or double chamber monochromator
spectral range 240 - 1100 nm (standard)
NIR to 1700 nm
extended NIR to 2200 nm
DUV from 193 nm
AutoRetarder (V-VASE)
computer-controlled 150 mm or 200 mm XY mapping
computer-controlled 350 mm x 400 mm mapping
(H-VASE)
manual 25 mm or 50 mm XY translation
200 µm focused beam option
camera
cryostat (4.2 to 470K)
heat cell (up to 300°C)

2. In-situ Spectroscopic Ellipsometer:

single or double chamber monochromator
spectral range 240 - 1100 nm (standard)
NIR to 1700 nm
In-situ mounts with UHV windows






Software
Application Notes

Video
VASE Video (WMV, 2,3 MB)


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 Your contact:


Henryk Dluzewski
Your contact in Poland
Phone: +48 322482048
Fax: +48 322482048
dluzewski@lot-oriel.com



Dr. Thomas Wagner
Phone: +49 6151 880668
Fax: +49 6151 896667
wagner@lot-oriel.de

 Linki:
Quantum Design:
www.QDUSA.com
External Links:
www.jawoollam.com

 Nowości:
Large Area Imaging at -100 °C ....the Andor iKon-M (PDF, 246 KB)
Merger between LOT-Oriel Europe and Quantum Design (PDF, 56 KB)
Near Infrared Beam Profiler
New Ultra High Speed Camera Cheetah

LOT-Oriel Polska
E-mail: dluzewski@lot-oriel.com

Szyb Walenty 32
41-700 RUDA SLASKA, POLEN

Phone/Fax: 48 322482048


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