LOT-Oriel - MASE

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MASE™ –
Multi-Angle Spectroscopic Ellipsometer

MASE™ simplifies multiple angle measurements by using beam steering optics to direct the measurement beam to three angles of incidence while the ellipsometer remains in a fixed position. This compact design is perfect for large area mapping where the ellipsometer can "hover" over the sample.

MASE™ Key Benefits

Based on proven M-2000® Technology

Patented RCE Technology (Rotating Compensator Ellipsometer)

Large spectral range and hundreds of wavelengths

Fast data acquisition speed

Short path length = better signal-to-noise
Optional integrated focusing optics

Very simple small spot data acquisition

Automated sample height adjustment

Ideal design for large area mapping

The MASE's compact design is perfect for large area mapping. The ellipsometer can "hover" over large samples and still provide superior data at multiple angles.


Available spectral ranges:
Model:
V:	370 bis 1000 nm (390 wavelengths)
U – U-Xe:	245 bis 1000 nm (470 wavelengths)
D:	193 bis 1000 nm (500 wavelengths)
VI:	370 bis 1700 nm (610 wavelengths)
UI:	245 bis 1700 nm (690 wavelengths)
DI:	245 bis 1700 nm (700 wavelengths)

Angle of incidence:

45°, 60°, 75°, fast, automated change of angle

High measurement speed:

measurement of entire spectrum simultaneously

Large thickness range:

few Angstroms to app. 10 µm and more

Advanced applications:

- Anisotropy

- Mueller Matrix

- Depolarization

Options

NIR extension

additional 220nm to extend the spectral range of models "V" and "U" to 1700 nm

Automated mapping options:

100 mm x 100 mm XY

200 mm RΘ

300 mm RΘ

Manual sample translation:

25 mm x 25 mm XY

50 mm x 50 mm XY

Software

Applications Notes

Video

MASE Video (WMV, 3,7 MB)

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Your contact:

Henryk Dluzewski
Your contact in Poland
Phone: +48 322482048
Fax: +48 322482048
dluzewski@lot-oriel.com

Dr. Thomas Wagner
Phone: +49 6151 880668
Fax: +49 6151 896667
wagner@lot-oriel.de

Linki:


Quantum Design:
→	www.QDUSA.com


External Links:
→	www.jawoollam.com

Nowości:


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→	Merger between LOT-Oriel Europe and Quantum Design (PDF, 56 KB)
→	Near Infrared Beam Profiler
→	New Ultra High Speed Camera Cheetah


	LOT-Oriel Polska E-mail: dluzewski@lot-oriel.com				Szyb Walenty 32 41-700 RUDA SLASKA, POLEN				Phone/Fax: 48 322482048		emotiv design