LOT-Oriel - M-2000

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M-2000™ –
Schnelles Spektroskopisches Ellipsometer

The M-2000™ Ellipsometer combines as world wide the first system the 'rotating compensator' method with CCD technology. This allows high speed measurements: min. 390 wavelengths in < 1 second. Available spectral ranges: M-2000V: 370 to 1000 nm (390 wavelengths) M-2000U: 245 to 1000 nm (470 wavelengths) M-2000D: 193 to 1000 nm (500 wavelengths) M-2000F: 245 to 1000 nm (580 wavelengths) ) M-2000VI: 370 to 1700 nm (610 wavelengths) M-2000UI: 245 to 1700 nm (690 wavelengths) M-2000DI: 193 to 1700 nm (700 wavelengths) ( for micro spot <50 µm) FP-M-2000: fully automated M-2000 for flat panel applications

Modern Technology

Rotating Compensator (RCE) Configuration!

RCE provides highest accuracy in "Delta" from 0° to 360° as well as further measurement modes

High measurement speed:

App. 500 wavelengths measured simultaneously

Because of typical measurement speed of a few seconds ideal for:

- Ex-situ mapping.

- In-situ process control

Large thickness range:

high number of wavelengths allows to measure layer thickness from Angstroms up to app. 10 µm and more

Extended measurement modes:

- Anisotropy

- Mueller Matrix

- Depolarization

Available Options

NIR extension

NIR diode array extends spectral range of models "V" and "U" to 1700 nm with additional 220 wavelenghts, 1000 nm to 1700 nm

Available Ex-situ Stages:

1. Single angle stage (75°), horizontal sample mount

2. Manual continuous angle of incidence goniometer (45° to 90°), horizontal sample mount

3. Computer controlled angle of incidence goniometer, vertikale (20 to 90°) or horizontal (45 to 90°) sample mount

In-Situ Package

Included UHV windows to mount to UHV chambers, tilt units, and mounting elements for 2" vacuum flanges

Automated Sample Translation:

100 mm x 100 mm XY (only horizontal sample mount)

150 mm x 150 mm XY

200 mm R (only horizontal sample mount)

300 mm R (only horizontal sample mount)

350 mm x 400 mm XY (FP M-2000)

370 mm x 470 mm XY (FP M-2000)

Manual Sample Translation:

25 mm x 25 mm XY (only horizontal sample mount)

50 mm x 50 mm XY (only horizontal sample mount)

Focusing:

Attachable focusing probes to achieve spot size of 150 to 300 µm (depending on model)

For collimated beam measurements, the focusing probes can easily be removed

**min. spot size available: 20 µm with M-2000F (fixed angle of incidence)

Software

Application Notes

Video

Micro Spot M2000 Video (WMV, 1,7 MB)

Automated M-2000UI Video (WMV, 1,7 MB)

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Your contact:

Henryk Dluzewski
Your contact in Poland
Phone: +48 322482048
Fax: +48 322482048
dluzewski@lot-oriel.com

Dr. Thomas Wagner
Phone: +49 6151 880668
Fax: +49 6151 896667
wagner@lot-oriel.de

Linki:


Quantum Design:
→	www.QDUSA.com


External Links:
→	www.jawoollam.com

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	LOT-Oriel Polska E-mail: dluzewski@lot-oriel.com				Szyb Walenty 32 41-700 RUDA SLASKA, POLEN				Phone/Fax: 48 322482048		emotiv design