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Spectroscopic Ellipsometers – Application Notes and Publications


Overview of Variable Angle Spectroscopic Ellipsometer (VASE), Part I: Basic Theory and Typical Applications
Abstract	PDF-Download (PDF, 1,3 MB)


Overview of Variable Angle Spectroscopic Ellipsometer (VASE), Part II: Advanced Applications
Abstract	PDF-Download (PDF, 503 KB)


Charakterisierung von Glasbeschichtungen mit Spektroskopischer Ellipsometrie
Abstract	PDF-Download (PDF, 195 KB)


Optical constants of 3,4,9,10-perylenetetracarboxylic dianhydride films on silicon and gallium arsenide studied by spectroscopic ellipsometry
Abstract	PDF-Download (PDF, 137 KB)


Variable Angle Spectroscopic Ellipsometry in the Vacuum Ultraviolet
Abstract	PDF-Download (PDF, 278 KB)


Optical characterization in the vacuum ultraviolet with Variable Angle Spectroscopic Ellipsometry: 157 nm and below
Abstract	PDF-Download (PDF, 156 KB)


Semiconductor superlattices
Abstract	PDF-Download (PDF, 242 KB)


Measurement of Silicon Doping Profiles using Infrared Ellipsometry Combined With Anodic Oxidation Sectioning
Abstract	PDF-Download (PDF, 1,6 MB)


IR-VASEª Messungen an einer dünner Silizium-Membran
Abstract	PDF-Download (PDF, 65 KB)


Characterisation of thin a-Si on c-Si using Multiple Sample Analysis
Abstract	PDF-Download (PDF, 59 KB)


VASEª Messungen an dünnen, beschichteten Mylarfolien
Abstract	PDF-Download (PDF, 174 KB)


DUV-VASEª Measurements of Photoresists and ARCs
Abstract	PDF-Download (PDF, 230 KB)


Bestimmung sehr geringer optischer Anisotropien in Polymerfolien mit dem Spektralellipsometer VASEª
Abstract	PDF-Download (PDF, 36 KB)


Spectroscopic ellipsometry and magneto-optic Kerr effects in Co/Pt multilayers
Abstract	PDF-Download (PDF, 517 KB)


In-Situ-Ellipsometrie zur Beschichtungssteuerung bei der Herstellung von Speichermedien
Abstract	PDF-Download (PDF, 33 KB)

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