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Spectroscopic Ellipsometers – Application Notes and Publications

Overview of Variable Angle Spectroscopic Ellipsometer (VASE),
Part I: Basic Theory and Typical Applications
Abstract PDF-Download (PDF, 1,3 MB)

Overview of Variable Angle Spectroscopic Ellipsometer (VASE),
Part II: Advanced Applications
Abstract PDF-Download (PDF, 503 KB)

Charakterisierung von Glasbeschichtungen mit Spektroskopischer Ellipsometrie
Abstract PDF-Download (PDF, 195 KB)

Optical constants of 3,4,9,10-perylenetetracarboxylic dianhydride films on silicon and gallium arsenide studied by spectroscopic ellipsometry
Abstract PDF-Download (PDF, 137 KB)

Variable Angle Spectroscopic Ellipsometry in the Vacuum Ultraviolet
Abstract PDF-Download (PDF, 278 KB)

Optical characterization in the vacuum ultraviolet with Variable Angle Spectroscopic Ellipsometry: 157 nm and below
Abstract PDF-Download (PDF, 156 KB)

Semiconductor superlattices
Abstract PDF-Download (PDF, 242 KB)

Measurement of Silicon Doping Profiles using Infrared Ellipsometry Combined With Anodic Oxidation Sectioning
Abstract PDF-Download (PDF, 1,6 MB)

IR-VASEª Messungen an einer dünner Silizium-Membran
Abstract PDF-Download (PDF, 65 KB)

Characterisation of thin a-Si on c-Si using Multiple Sample Analysis
Abstract PDF-Download (PDF, 59 KB)

VASEª Messungen an dünnen, beschichteten Mylarfolien
Abstract PDF-Download (PDF, 174 KB)

DUV-VASEª Measurements of Photoresists and ARCs
Abstract PDF-Download (PDF, 230 KB)

Bestimmung sehr geringer optischer Anisotropien in Polymerfolien mit dem Spektralellipsometer VASEª
Abstract PDF-Download (PDF, 36 KB)

Spectroscopic ellipsometry and magneto-optic Kerr effects in Co/Pt multilayers
Abstract PDF-Download (PDF, 517 KB)

In-Situ-Ellipsometrie zur Beschichtungssteuerung bei der Herstellung von Speichermedien
Abstract PDF-Download (PDF, 33 KB)


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