Probe stations – test systems for chips and wafers

We have recently added probe stations by Janis Research, a specialist in the cryostate and cryotechnology field, to our product range. Probe stations are test systems for electronic measurements on wafers, chips, MEMS and other devices. Options include DC and low frequency measurements up to 20 MHz and microwave measurements up to 67 GHz. The wafer may also be excited by an optical fiber.

The low-cost basis system ST-500 features:

Temperature range from 3 K to 475 K

Use of liquid helium or liquid nitrogen

Low-vibration technology

Fast cool-down and warming

Four metal bellows to permit probe translation

Four x, y, z translation stages for exact µm-positioning

Sample size up to 52 mm

The system may be adapted to customers’ applications. Additional useful options include a microscope (with or without camera) or magnet to create vertical or horizontal fields.

Low-frequency measurements are done with coaxial or triaxial cables or a combination of the two (2 cables total – Kelvin contacting).

Microwave measurements may be done in ranges of up to 40, 50 and 67 GHz.

Code 746: Information on Probe stations

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