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HTS-110 cryogen-free superconducting AC magnet installed at Nissin Ion, Japan

HTS-110 has installed a world leading cryogen-free high-temperature superconducting AC scanning magnet at their partner‘s Nissin Ion Equipment Co. Ltd., Japan for an experimental ion-implanter beam-line.

Ion-implantation is a critical step in the production of integrated circuits in the semiconductor industry. Traditional ion-implanters use numerous large and heavy copper magnets to control the ion beam. As integrated circuits continue to shrink, more powerful implanter magnets are required. These larger magnets add significantly to the overall ion-implanter size and weight, creating substantial shipping, installation, and operational issues. Copper magnets are also large users of water and energy in an industry that has significant pressure to reduce its environmental footprint.

Superconductors can carry more than 100 times the current of an equivalent copper wire below a certain temperature. The use of high-temperature superconductors in HTS-110’s magnets means they can be much smaller and lighter than copper equivalents, allowing Nissin Ion to potentially shorten their beam lines, providing benefits for the implantation process as well as reducing transportation, energy and water costs.



While a handful of HTS AC magnets have been produced before, none have had the challenging requirements of a high frequency scanning field in continuous operation for use in a demanding system. The HTS magnet was designed to operate at frequencies up to 200 Hz using first generation (1G) HTS wire; increases in field and frequency are possible with second generation (2G) HTS wire, and further improvements will be possible with the use of specially cabled HTS wires.


About HTS-110



HTS-110 develops and manufactures a range of scientific and industrial products based on high-temperature superconducting magnets.

The company’s name refers to the high-temperature superconductors used in all HTS-110 products. Superconductors are materials that lose their electrical resistance when cooled below a certain
temperature, at which point they can carry more than 100 times the current

of an equivalent copper wire. High-temperature superconductors (HTS) operate below 110 Kelvin (-163°C); such temperatures are readily achievable compared to earlier discovered (low-temperature) superconductors that need to operate around 4 Kelvin (-269°C). By using high-temperature superconductors, HTS-110 products are lighter, smaller and more efficient than competing solutions.

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