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Spectroscopic Ellipsometers

LOT-Oriel is the European representative of Woollam Co., the world market leader in the field of spectroscopic ellipsometry.

We offer ellipsometers for basic reasearch as well as for production control to determine optical constants and film thickness, even of mulitlayer systems, in-situ and ex-situ.

Spectroscopic Ellipsometers from VUV up to FIR range, with the most sophisticated and user-friendly software.



Detailed Information:

VASE® (with Video)
Powerfull R&D variable angle spectroscopic ellipsometer with wide spectral range (193-2200nm)
M-2000® (with Video)
Revolutionary rotating compensator technology. Many spectral ranges available from 193 to 1700nm
VUV-VASE™ (with Video)
Spectroscopic ellipsometer covering the vacuum UV to the NIR. Perfect for lithography applications at 248nm, 193nm, and 157nm
MASE™ (with Video)
New multi-angle base for M-2000 ellipsometers. The ellipsometer remains fixed while beam steering optics change the angle of incidence
IR-VASE®
Infrared ellipsometer with spectral coverage from 2 to 35µm
Alpha-SE™ (with Video)
Low cost spectroscopic ellipsometer, easy to use

Application oriented Woollam WVASE Trainings Course
Software
Application Notes
Woollam Co. (www.jawoollam.com)
Laboratory


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 Your contact:


Kathleen Struyve
Your contact in BeNeLux
Phone: +32 57 36 39 54
+31 10 28 59 511
Fax: +32 57 36 09 54
struyve@lot-oriel.com



Dr. Thomas Wagner
Phone: +49 6151 880668
Fax: +49 6151 896667
wagner@lot-oriel.de

 Links:
Quantum Design:
www.QDUSA.com
External Links:
www.jawoollam.com
Arbeitskreis Ellipsometrie (AKE) - Paul Drude e.V.
5th Workshop Ellipsometry, Zweibrücken, March 2nd - 4th, 2009

 News:
Wir suchen einen Vertriebsmitarbeiter im Bereich Spezialkameras/Spektroskopie (PDF, 282 KB)
Large Area Imaging at -100 °C ....the Andor iKon-M (PDF, 246 KB)
Merger between LOT-Oriel Europe and Quantum Design (PDF, 56 KB)

LOT-Oriel GmbH & Co. KG
E-mail: struyve@lot-oriel.com

Im Tiefen See 58
D-64293 Darmstadt

Phone: +32 57 36 39 54
Fax: +32 57 36 09 54


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