VeriFire™ Asphere

Fast, Noncontact, High-Accuracy 3D Metrology of Aspheric Surfaces

The VeriFire™ Asphere provides high resolution surface metrology for quantitative three-dimensional measurements of aspheric shaped surfaces using patented noncontact interferometric techniques for production and process control.

Features:

• Fast and flexible aspheric metrology
• Noncontact measurement maintains surface integrity
• Easy set-up and alignment results in
• excellent production throughput
• High resolution 3D result ensures measurement
• of localized surface features

Based on two of ZYGO's core competencies, the patented multi-zoned metrology method provides a high resolution measurement of an aspheric surface. With multiple axes of motorized stages, the VeriFire™ Asphere offers automated alignment, acquisition and analysis. The result is a fast, high resolution quantitative aspheric surface measurement.

The VeriFire™ Asphere system is a production friendly vertical workstation for noncontact high-resolution optical metrology of aspheric surfaces. With its high data density measurement, the VeriFire™ Asphere can resolve mid spatial frequency features in addition to the form of an asphere. The three dimensional result provides visibility to localized surface imperfections independent of part orientation – an important capability for insuring accurate process control.

The VeriFire™ Asphere system is configured with a VeriFire™ AT laser Fizeau interferometer and a ZMI 501 displacement interferometer system. The two axes of linear displacement interferometry track the motion of the test part along the optical axis during the multi-step vertical scan with 2.5 nm resolution.

Configured with a high-resolution 1K x 1K imaging camera, the VeriFire™ AT Fizeau interferometer allows for over 700,000 points per measurement to be achieved with the VeriFire™ Asphere. The AT mainframe also offers the ability to perform high accuracy artifact-free interferometry with its Ring of Fire™ extended source. Depending on the diameter of the parts to be measured the VeriFire™ Asphere system can be configured with either a 4-inch or 6-inch mainframe.

The VeriFire™ Asphere system operates on ZYGO's industry-preferred MetroPro® software platform. In addition to the new aspheric metrology capability, the instrument can be utilized as a vertical workstation for metrology of flats, spheres, and radius of curvature measurements. The advanced software algorithms in the VeriFire™ Asphere utilize five axes of motorized stages to provide quick and easy alignment of an asphere. The combination of user independent part set-up and automated acquisition and analysis makes the VeriFire™ Asphere an ideal production metrology solution.

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Brochure for VeriFire Asphere

Spec Sheet for VeriFire Asphere