IR-VASE® Key Benefits
Spectral Range: 2 to 30 microns
Rotating compensator (RCE) configuration
This configuration provides accurate "Delta" data from 0° to 360° as well as advanced measurement capabilities.
High precision automated angle
- EPI-lay thickness
- resistivity measurements
- doping profiles
Similar to FTIR spectroscopy, but with all the benefits of ellipsometry: sensitivity to ultrathin films, opaque substrates, multilayers, etc.
Acquire both ellipsometry and standard FTIR transmission measurements.
IR-VASE® Available Options
Additional Detector for standard FTIR Reflection/Transmission measurements