IR-VASE®

IR-VASE® Key Benefits

Spectral Range: 2 to 30 microns

Rotating compensator (RCE) configuration

This configuration provides accurate "Delta" data from 0° to 360° as well as advanced measurement capabilities.

High precision automated angle

Semiconductor applications

• EPI-lay thickness
• resistivity measurements
• doping profiles

Polymer analysis

Similar to FTIR spectroscopy, but with all the benefits of ellipsometry: sensitivity to ultrathin films, opaque substrates, multilayers, etc.

Acquire both ellipsometry and standard FTIR transmission measurements.

IR-VASE® Available Options

Additional Detector for standard FTIR Reflection/Transmission measurements

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IR-VASE