Rapid developments in the areas of nanotechnology, precision mechanics and thin-film technology, as well as the development of novel materials necessitate increasingly precise knowledge of the surface of the workpiece or the material to be processed as well as quality control after processing.
The profilometers manufactured by KLA-Tencor are optimally suited to meet these increasingly stringent requirements with regard to quality assurance in production, research, and service settings.
Surface Profiler AlphaStep IQ
P-16+ Surface Profiler
P-6 Stylus Profiler
Film Stress Measurement System Flexus FLX-2320 S
Film Stress Measurement System FLX 3300, 300 mm Version
Apex Software
Apex 2D/3D in a few minutes – Information Note
LOT-Oriel GmbH & Co. KG | info@lot-oriel.de | Im Tiefen See 58 | D-64293 Darmstadt | Tel.: +49 6151 88060 | Fax: +49 6151 896667 | HRB Amtsgericht Darmstadt 6538