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VUV-VASE

 

Spectroscopic Ellipsometer for spectral range down to vacuum ultraviolet

 

The new VUV-VASE provides spectroscopic ellipsometry even down to the VUV spectral range:

 

  • spectral range: 146 to 1700 nm
  • verticale sample mount
  • motorized angle of incidence goniometer: 25° to 90°
  • AutoRetarder
  • Ellipsometry, Transmittance and reflectance
  • large sample load lock cell: 300mm wafer, 6" photo-masks
  • XY sample mapping

 

The VUV-VASE received the 'R&D Top 100' as well as the 'Semiconductor International Editors Choice Best Product' award 2000!


 

 

Downloads

 

VUV-VASE Video

VUV-VASE



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LOT-QuantumDesign GmbH | info@lot-qd.de | Im Tiefen See 58 | D-64293 Darmstadt | Tel.: +49 6151 88060 | Fax: +49 6151 8806920 | HRB Amtsgericht Darmstadt 6538