L.O.T.-Oriel GmbH & Co. KG together with the J.A. Woollam Co., Inc. is happy to introduce a new course on Ellipsometry Data Analysis that targets intermediate to advanced users. Students should have at least some ellipsometry experience and a proficiency with CompleteEASE software. The course will be divided into sessions that include thin and thick film analysis, transparent and absorbing layers, graded, Paramterized Optical Constants Layers, in-situ. To support the lectures, participants will work examples on individual computers (participants need to bring their own notebook).
Learn the intimate details of our most powerful layer. Session will begin with a review of the information for standard data analysis. However, it will quickly proceed to topics including advanced oscillator types: Gauss, Lorentz, Tauc- and Cody-Lorentz, PSEMI…
The Genosc layer is both powerful and versatile and we examine advanced methods that unlock the full utility of this layer. We will also discuss how to control correlation and minimize the number of free parameters.
Ellipsometry measurements are often sensitive to optical gradients within a thin film. The CompleteEASE software offers a variety of models to approach graded samples – starting with the Simple Graded layer and working toward the EMA-Based Graded layer and further toward the Function–based Graded layer.
Time dependent real-time measurement requires different analysis strategies. CompleteEASE has dedicated software features to account for that, which will be discussed during an extra session.
Day 1: Transparent Films through UV Absorption
1) Theory and Overview of Modeling Process
*includes backside reflections, Cauchy
3) Transparent Films
*includes mouse roll-wheel, more Cauchy
4) Transparent Films, cont.
*includes Sellmeier (first introduction to Genosc), Global Fit
5) EMA, Roughness
6) Simple Grading
7) B-Spline Fit for UV absorption
Day 2: Absorbing Films
8) Overview of Absorbing Films Methods
*includes interference enhancement, SE+T, multi-sample analysis, and simple GENOSC (already created)
*includes theory and application of Genosc for various samples
Day 3: Advanced Topics and Review
10) Advanced Data Types
*Depolarization with examples
*generalized ellipsometry and MM
11) In-situ with examples
Open for official registration
Registration deadline: 17.09.2012
The number of participants for the seminar is limited to 20 persons.
After receiving your registration we will send a short confirmation. Final confirmation including program and description how to find L.O.T. will be sent together with the invoice.
The fee for the three days CompleteEASE Trainings Course:
720,- € Brutto standard price,
500,- € Brutto student price - on demand (not applied to PhD student)
Price includes training course, coffee breaks and lunch buffet, plus joined seminar dinner on
Wednesday evening, 19:00h, October 17th, 2012.
Cancellation policy: in case of cancelation until 17th September full refund, until 4th October refund of 80%, after no refund.
The seminar will start at 09:00 o’ clock and will end at around 17:00 in the afternoon.
Travel and hotel expenses should be paid by the participants. We ask to look for hotel reservation
We have done pre-reservation of a limited number of hotel rooms at the Contel Hotel in Darmstadt,
Phone: +49-6151-800900. Pre-reservation will be held until October 5th, 2012.
Price per night is EUR 74,00 excl. breakfast, EUR 83,50 incl. breakfast .
When booking please use the code: LOT171012.